Diffraction-limited soft-x-ray projection imaging using a laser plasma source.
نویسندگان
چکیده
Projection imaging of 0.1-microm lines and spaces is demonstrated with a Mo/Si multilayer coated Schwarzschild objective and 14-nm illumination from a laser plasma source. This structure has been etched into a silicon wafer by using a trilevel resist and reactive ion etching. Low-contrast modulation at 0.05-microm lines and spaces is observed in polymethylmethacrylate.
منابع مشابه
High numerical aperture tabletop soft x-ray diffraction microscopy with 70-nm resolution.
Light microscopy has greatly advanced our understanding of nature. The achievable resolution, however, is limited by optical wavelengths to approximately 200 nm. By using imaging and labeling technologies, resolutions beyond the diffraction limit can be achieved for specialized specimens with techniques such as near-field scanning optical microscopy, stimulated emission depletion microscopy, an...
متن کاملSoft-x-ray projection lithography
Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.
متن کاملOptimum driving a Z-pinch for soft X-Ray lasers
A capillary plasma z-pinch as an alternative active medium of soft X-Ray lasers was studied experimentally and theoretically. The theoretical analysis was based on the self consistent solution of the so called “snow plow” model. The dynamics of pinched plasma is determined by the capillary parameters and by the time dependence of electrical current passing through it. The current time dependenc...
متن کاملCompact scanning soft-x-ray microscope using a laser-produced plasma source and normal-incidence multilayer mirrors.
We have constructed a scanning soft-x-ray microscope that uses a laser-produced plasma as the soft-x-ray source and normal-incidence multilayer-coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 14 nm, has a spatial resolution of 0.5 microm, and has a soft-x-ray photon flux through the focus of 10(4)-10(5) sec(-1) when operated wit...
متن کاملX-ray generation by femtosecond laser pulses and its application to soft X-ray imaging microscope
We have developed laser-produced plasma X-ray sources using femtosecond laser pulses at lOHz repetition rate in a table-top size in order to investigate basic mechanism of X-ray emission from laser-matter interactions and its application to a X-ray microscope. In a soft X-ray region over 5 nm wavelength, laser-plasma X-ray emission from a solid target achieved an intense flux of photons of the ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
- Optics letters
دوره 16 20 شماره
صفحات -
تاریخ انتشار 1991